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Hot filament chemical vapor deposition (HFCVD) has many advantages such as mature technology and simple equipment. It is one of the most widely used methods for preparing diamond thin films in industry. Designed for the synthesis of nanodiamond coatings, CVD diamond films, microcrystalline CVD diamond coatings, graphene, carbon nanotubes (CNTs) and various other thin film coatings. As the hardest substance in all known materials, diamond also has high thermal conductivity, high elastic modulus, good wear resistance, corrosion resistance, low friction coefficient and chemical stability, and is an excellent material for cutting. The equipment includes a reaction chamber, a support system, a water system, a gas system, and an automatic control system. The equipment is compact in structure and reasonable in layout. After years of equipment research and development by the engineer team, repeated deliberation, many experiments, combined with the computer-aided design system, have been checked and verified countless times. The equipment has excellent deposition performance and reliable safety. This product is an excellent device integrating energy saving, reliability, convenience and intelligence.
HFCVD Product features:
This product is a double-layer stainless steel cavity structure, with a compact and reasonable structure;
This product is divided into two parts: the upper stage and the lower stage. In addition to supporting the reaction chamber, the lower stage is also used to arrange gas valve, water pipeline and various control components. Arrange display panels and power supply devices on the bench to reasonably shield circuit interference;
This product fully disperses the cooling water channel layout (the upper cover of the cavity, the upper and lower layers of the cavity body and the bottom plate, as well as the hot wire elastic device, etc.). Water pumps, water pipes, intelligent monitoring flow meters, water manifolds, etc. are all closed circulation systems.
The gas circuit combination of this product is mainly composed of process gas supply system and vacuum system, reasonable distribution of gas pipelines, effective use of available space, real-time monitoring and precise control of gas flow and pressure.
This product uses a two-stage chip vacuum pump, and the pumping speed is stable at 65m3/h. The ultimate absolute vacuum full pressure is 0.5Pa, and the protection level is IP54.
One of the common methods for diamond film production is the hot wire vapor deposition technique (HFCVD), where a gas mixture is heated by passing along a long, thin W or Ta wire (∅100 to 300 μm) heated to 2400ºC. (HFCVD) Usually only two gases are required: H2 and CH4, with methane diluted in hydrogen at 1 vol% to 2 vol%. The total pressure in the HFCVD reactor usually varies between 20 mbar and 200 mbar, with the total flow rate depending on the size and geometry of the reactor. (HFCVD) In contrast to microcrystalline diamond films (MCD), the type of diamond coating is called nanocrystalline diamond (NCD). NCD is characterized by nanocrystalline size (1 nm to 50 nm) and an extremely smooth surface, which retains the hardness of MCD and has improved wear and friction resistance compared to MCD.
These coatings often require the addition of a third inert gas, which aids in the formation of NCD by altering the heat load of the chamber gases during production to enhance the renucleation process and also affect substrate heating. The system is more complex than an MCD system and requires extra care in the control and monitoring of the feed gases. (HFCVD) A further modification of this type of reactor involves doping the diamond coating with boron (MCD and NCD) during formation to make it conductive. A liquid containing a boron (B) species is typically used and the boron vapor is bubbled through the hot filament and diamond coating by a carrier gas. The doping level is adjusted by selecting the appropriate boron concentration and adjusting the gases passing through. When performing NCD, the task becomes even more difficult because three gases are involved.
HFCVD Technical indicators and characteristics:
HFCVD Product features:
This product is a double-layer stainless steel cavity structure, with a compact and reasonable structure;
This product is divided into two parts: the upper stage and the lower stage. In addition to supporting the reaction chamber, the lower stage is also used to arrange gas valve, water pipeline and various control components. Arrange display panels and power supply devices on the bench to reasonably shield circuit interference;
This product fully disperses the cooling water channel layout (the upper cover of the cavity, the upper and lower layers of the cavity body and the bottom plate, as well as the hot wire elastic device, etc.). Water pumps, water pipes, intelligent monitoring flow meters, water manifolds, etc. are all closed circulation systems.
The gas circuit combination of this product is mainly composed of process gas supply system and vacuum system, reasonable distribution of gas pipelines, effective use of available space, real-time monitoring and precise control of gas flow and pressure.
This product uses a two-stage chip vacuum pump, and the pumping speed is stable at 65m3/h. The ultimate absolute vacuum full pressure is 0.5Pa, and the protection level is IP54.
Hot filament chemical vapor deposition (HFCVD) |
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Equipment type |
CY-8904 |
CY-8906 |
Vacuum chamber structure |
Vertical front door, rear air extraction system, double water cooling |
|
Vacuum chamber dimensions |
OD450mmxH500mm |
OD600mmxH500mm |
Vacuum system |
Compound molecular pump high vacuum system |
High vacuum pump system |
Substrate size |
OD100mm |
OD200mm or 200mm square substrate table (rotation, lifting optional) |
Substrate temperature |
600-1100℃ |
|
Power source |
Special hot wire power supply 400A, constant current or constant power mode |
Special hot wire power supply 800A, constant current or constant power mode |
Gas path control |
4-way gas flow control |
4-way gas flow control |
Control mode |
PLC touch screen control |
PC+PLC+ touch screen control |
Floor space |
Host L1200mmxW1060mmxH1900mm |
Host L1620mmxW1060mmxH1900mm |
Gross power |
>20kW |
>43kW |
Scope of application |
College scientific research and experiment, teaching |
Industrial production and scientific research |
Product excellence/features |
Hot wire chemical vapor deposition diamond technology has been widely used in many domestic production lines for diamond cutting tools. Fully automated control and stable equipment processes and technologies are suitable for high-end nano-diamond coating applications and are widely used in aviation manufacturing, precision molds and wire drawing dies, BDD electrodes, etc. The equipment has grown large-size flake multi-grade diamond thick films, filling the domestic gap and achieving very considerable economic benefits. |
|
Main use |
It is used to grow millimeter-level diamond thick films, nanocrystalline diamond coatings or micron-crystalline diamond coatings, diamond-like films, silicon nitride and silicon oxide films, etc., and to deposit diamond films on the surfaces of cutting tools, mold taps, BDD water treatment electrodes, etc. |
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Cooig Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
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